منابع مشابه
Residual Stress Variation in Polysilicon Thin Films
This paper compares the use of four mechanical methods for characterization of residual stress variation in low pressure chemical vapor deposited (LPCVD) polysilicon thin films deposited, doped, and annealed under different conditions. Stress was determined using buckling structures, vibrating microstructures, static rotating structures and the wafer curvature method. After deposition of 1.0 μm...
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Residual stress analysis was performed on thick, 1–25 lm, depleted uranium (DU) films deposited on an Al substrate by magnetron sputtering. Two distinct characterization techniques were used to measure substrate curvature before and after deposition. Stress evaluation was performed using the Benabdi/Roche equation, which is based on beam theory of a bi-layer material. The residual stress evolut...
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چکیده ندارد.
15 صفحه اولResidual stress effects on piezoelectric response of sol-gel derived lead zirconate titatnate thin films
Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
متن کاملResidual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films
Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
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ژورنال
عنوان ژورنال: Acta Crystallographica Section A Foundations of Crystallography
سال: 2000
ISSN: 0108-7673
DOI: 10.1107/s0108767300023291